Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2011-01-18

2011-01-18

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S067000, C355S077000, C359S490020, C359S506000

Reexamination Certificate

active

07872731

ABSTRACT:
A lithographic apparatus includes a polarization changing element including at least two wedge-shaped optically active members configured to rotate the polarization direction of at least a portion of the radiation beam with a predetermined angle with respect to the first direction and an optical propagation length adaptor associated with the wedge-shaped optically active members to adjust the predetermined angle.

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patent: 7239446 (2007-07-01), Kreuzer
patent: 2002/0080338 (2002-06-01), Taniguchi
patent: 2005/0002111 (2005-01-01), Gruner et al.
patent: 2005/0206871 (2005-09-01), Tsuji
patent: 2006/0170901 (2006-08-01), Tanitsu et al.
patent: 2007/0146676 (2007-06-01), Tanitsu et al.
patent: 2008/0273185 (2008-11-01), Omura et al.
patent: 2009/0115989 (2009-05-01), Tanaka
patent: WO 2005124420 (2005-12-01), None

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