Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2007-08-21
2007-08-21
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000
Reexamination Certificate
active
10948787
ABSTRACT:
A method and a system for accurate positioning of an object are presented. An embodiment of the invention includes an electromagnetic actuator including a coil assembly. The coil assembly includes two coils that encloses a magnet assembly including a magnet that is magnetized in the direction of the generated force. The generated force is substantially constant over the operating range of the actuator. The actuator may further be equipped with a cooling body surrounding the coil assembly.
REFERENCES:
patent: 3772540 (1973-11-01), Benson
patent: 4507597 (1985-03-01), Trost
patent: 4724412 (1988-02-01), Kalafala
patent: 4751487 (1988-06-01), Green, Jr.
patent: 4858452 (1989-08-01), Ibrahim
patent: 5012144 (1991-04-01), Huitema et al.
patent: 5024247 (1991-06-01), Lembke
patent: 5079534 (1992-01-01), Steingroever et al.
patent: 5309050 (1994-05-01), Morinigo et al.
patent: 5844666 (1998-12-01), Van Engelen et al.
patent: 6437864 (2002-08-01), Watanabe et al.
patent: 2002/0140298 (2002-10-01), Maruyama
patent: 2003/0016107 (2003-01-01), Hazelton
patent: 2004/0070285 (2004-04-01), Sogard
ASML Netherlands B.V.
Gutierrez Kevin
Perkey W. B.
Pillsbury Winthrop Shaw & Pittman LLP
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