Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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C355S053000

Reexamination Certificate

active

10948787

ABSTRACT:
A method and a system for accurate positioning of an object are presented. An embodiment of the invention includes an electromagnetic actuator including a coil assembly. The coil assembly includes two coils that encloses a magnet assembly including a magnet that is magnetized in the direction of the generated force. The generated force is substantially constant over the operating range of the actuator. The actuator may further be equipped with a cooling body surrounding the coil assembly.

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