Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-06-12
2007-06-12
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S071000
Reexamination Certificate
active
11018929
ABSTRACT:
An apparatus and system that form a hexagonal exposed spot grid on a substrate. This is accomplished by using a patterning device that directs a patterned beam onto a microlens array, which forms Fourier transformed spots of the pattered beam at the substrate. Through at least one of (a) moving of the substrate that is patterned by the patterning device and/or changing a frequency of a beam of radiation or (b) through a hexagonal configuration of the patterning device and the microlens array, the spots from the microlens array form the hexagonal exposed spot grid on the substrate.
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Baselmans Johannes Jacobus Matheus
Tinnemans Patricius Aloysius Jacobus
Venema Willem Jurrianus
ASML Netherlands B.V.
Rutledge D.
Sterne Kessler Goldstein & Fox PLLC
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