Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-12-18

2007-12-18

Mathews, Alan (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S739000

Reexamination Certificate

active

11194764

ABSTRACT:
The projection system of a lithographic apparatus has a plurality of pupil planes and at least two irises provided in respective pupil planes each optimized to provide a high degree of NA uniformity over a respective NA range so that a high degree of NA uniformity can be provided over a wide range of NA settings.

REFERENCES:
patent: 5363172 (1994-11-01), Tokuda
patent: 5706091 (1998-01-01), Shiraishi
patent: 6445510 (2002-09-01), Schuster et al.
patent: 6884699 (2005-04-01), Ogawa et al.
patent: 2005/0099614 (2005-05-01), Sugita et al.
patent: 2006/0256447 (2006-11-01), Dodoc

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