Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-12-18

2007-12-18

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C355S075000

Reexamination Certificate

active

11377636

ABSTRACT:
A moveable member is provided which extends the top surface of a substrate table, in plan, beyond a bumper which protects the substrate table during collision. The moveable member may be retracted to a retracted position in which it no longer extends beyond the bumper. In this way it is possible to move two substrate tables together and to allow the retractable member to pass under a liquid supply system which normally provides liquid between the projection system and a substrate without turning off of the liquid supply system.

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patent: 7098991 (2006-08-01), Nagasaka et al.
patent: 7199858 (2007-04-01), Lof et al.
patent: 2006/0139614 (2006-06-01), Owa et al.
patent: 2007/0127006 (2007-06-01), Shibazaki
patent: 1 420 298 (2004-05-01), None
patent: 1 420 300 (2004-05-01), None
patent: 1 420 298 (2005-10-01), None
patent: 99/49504 (1999-09-01), None

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