Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-08-14
2007-08-14
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
11018928
ABSTRACT:
A lithographic method and apparatus comprises an illumination system that supplies a beam of radiation, a patterning device that patterns the beam, and a projection system that projects the patterned beam onto a target portion of a substrate. A metrology system is provided adjacent the projection system for aligning the substrate with the projection system. Two or more movable chucks are each arranged to support a substrate and move between a loading device and the projection system. The chucks are independently movable so that one substrate can be passed through the metrology system and patterned beam while the other substrates are moved between the loading system and projection system.
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Luttikhuis Bernardus Antonius Johannes
Van Der Schoot Harmen Klaas
Vosters Petrus Matthijs Henricus
ASML Netherlands B.V.
Rutledge D.
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