Radiant energy – Irradiation of objects or material
Reexamination Certificate
2007-12-11
2007-12-11
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S548000, C355S067000
Reexamination Certificate
active
11019524
ABSTRACT:
A lithographic apparatus includes a projection system including a movable optical element. The movable optical element is capable, by a displacement thereof to influence a position quantity of a radiation beam projected by the projection system. A control device is provided to drive the optical element actuator to influence a position quantity of the movable optical element, thereby influencing a position quantity of the radiation beam as projected by the projection system. The control device is adapted to move the movable optical element to position the radiation beam as projected by the projection system with respect to the substrate, or to correct a position quantity of the radiation beam as projected by the projection system caused by any type of disturbance on the projection system.
REFERENCES:
patent: 6414743 (2002-07-01), Nishi et al.
patent: 6563128 (2003-05-01), Lublin et al.
patent: 2003/0007138 (2003-01-01), Shigematsu et al.
patent: 2004/0114121 (2004-06-01), Nishi et al.
De Jongh Robertus Johannes Marinus
Franken Dominicus Jacobus Petrus Adrianus
Jansen Bastiaan S H
Kleijn Jacob
Van Der Wijst Marc
ASML Netherlands B.V.
Johnston Phillip A.
Pillsbury Winthrop Shaw & Pittman LLP
Wells Nikita
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