Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-06-12
2007-06-12
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S071000, C355S055000
Reexamination Certificate
active
11373503
ABSTRACT:
A lithographic apparatus includes a radiation system that provides a beam of radiation, and a support structure that supports a patterning structure. The patterning structure is configured to pattern the beam of radiation according to a desired pattern. The apparatus also includes a substrate support that supports a substrate, and a projection system that projects the patterned beam onto a target portion of the substrate. The projection system includes an optical element that has a beam exit area through each of which the patterned beam passes. The apparatus further includes a fluid cleaning system that cleans a fluid to be introduced into a region in between the optical element and the substrate. The fluid cleaning system includes a fluid inlet, a fluid outlet, and a cleaning zone disposed between the inlet and outlet. The cleaning zone includes a nucleated surface provided with a plurality of nucleation sites.
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International Search Report issued for PCT Application PCT/NL2004/000927 on Dec. 19, 2005.
Dirksen Peter
Kroon Mark
Kurt Ralph
Owen Cassandra May
Van Beek Michael Cornelis
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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