Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-02-27

2007-02-27

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000, C250S492200

Reexamination Certificate

active

10875505

ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes an illumination system for providing a beam of radiation, a support surface having an edge, and a support structure for supporting an object to be moved across the beam of radiation. The support structure is moveably supported on the support surface. The apparatus also includes a rim that is associated with the support surface. The support structure and the rim are configured to allow the support structure to move in a first direction toward the rim and collide with the rim. A total force generated by the collision on the support structure is at least partially directed away from a second direction that is opposite to the first direction.

REFERENCES:
patent: 5508518 (1996-04-01), Kendall
patent: 2001/0004105 (2001-06-01), Kwan et al.
patent: 2004/0031932 (2004-02-01), Vosters et al.

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