Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2007-12-11
2007-12-11
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S075000
Reexamination Certificate
active
10980833
ABSTRACT:
A lithographic apparatus includes an illumination system for conditioning a beam of radiation, and an article support for supporting a substantially flat article to be placed in a beam path of the beam of radiation. The article support includes a plurality of supporting protrusions that define a support zone for providing a substantially flat plane of support. The apparatus also includes a backfill gas feed for providing an improved thermal conduction between the article and the article support. The backfill gas feed includes a backfill gas discharge zone for feeding backfill gas to a backside of the article when supported by the article support. The backfill gas discharge zone substantially encloses the support zone.
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Donders Sjoerd Nicolaas Lambertus
Ottens Joost Jeroen
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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