Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-01-09
2007-01-09
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
Reexamination Certificate
active
10932318
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes a projection optics assembly for projecting a patterned beam of radiation onto a target portion of a substrate. The assembly includes a plurality of movable optical elements and a plurality of sensor units for sensing a position and/or orientation of a respective optical element. The movable optical elements are arranged in a spaced relationship on a support frame. The support frame is at least partly formed by an assembly of at least two interconnected segments. Each of the segments movably mount at least one of the optical elements and fixedly mount at least one of the sensor units. The support frame serves as a reference and mounting frame within which the optical elements are mounted in the spaced relationship.
REFERENCES:
patent: 6441884 (2002-08-01), Takahashi et al.
patent: 6549270 (2003-04-01), Ota
patent: 6614503 (2003-09-01), Uzawa
patent: 2003/0117600 (2003-06-01), Taniuchi et al.
patent: 2004/0051984 (2004-03-01), Oshino et al.
patent: 1 278 089 (2003-01-01), None
patent: 0 321 823 (2003-06-01), None
patent: 1 321 822 (2003-06-01), None
patent: 1 278 089 (2004-02-01), None
patent: 2003-0035813 (2003-05-01), None
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
LandOfFree
Lithographic apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3819018