Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-07-03
2007-07-03
McPherson, John A. (Department: 1756)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S077000, C430S311000, C250S492220, C250S492230
Reexamination Certificate
active
10738992
ABSTRACT:
In a projection system a pattern plane on a reticle is illuminated to have a projection image focussed on an image plane. The presence of a pellicle in the optical path causes a virtual shift of the position of the pattern plane on the reticle. Depending on the presence or absence of the pellicle the image plane of the projection image needs to be adapted for proper focussing. A compensator counteracts the virtual shift of pattern plane due to the pellicle, by shifting the position of the pattern plane.
REFERENCES:
patent: 5581324 (1996-12-01), Miyai et al.
patent: 7081946 (2006-07-01), Hagiwara et al.
patent: 2002/0086224 (2002-07-01), Kanda
patent: 2002/0112824 (2002-08-01), Ballard et al.
patent: 1 158 361 (2001-11-01), None
patent: 1 231 513 (2002-08-01), None
patent: WO200265519 (2002-08-01), None
Baggen Marcel Koenraad Marie
Baselmans Johannes Jacobus Matheus
Bruls Richard Joseph
Jansen Albert Johannes Maria
Jasper Johannes Christiaan Maria
ASML Netherlands B.V.
Chacko-Davis Daborah
McPherson John A.
Pillsbury Winthrop Shaw & Pittman LLP
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