Lithographic apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat

Reexamination Certificate

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Details

C355S030000, C355S077000, C430S311000, C250S492220, C250S492230

Reexamination Certificate

active

10738992

ABSTRACT:
In a projection system a pattern plane on a reticle is illuminated to have a projection image focussed on an image plane. The presence of a pellicle in the optical path causes a virtual shift of the position of the pattern plane on the reticle. Depending on the presence or absence of the pellicle the image plane of the projection image needs to be adapted for proper focussing. A compensator counteracts the virtual shift of pattern plane due to the pellicle, by shifting the position of the pattern plane.

REFERENCES:
patent: 5581324 (1996-12-01), Miyai et al.
patent: 7081946 (2006-07-01), Hagiwara et al.
patent: 2002/0086224 (2002-07-01), Kanda
patent: 2002/0112824 (2002-08-01), Ballard et al.
patent: 1 158 361 (2001-11-01), None
patent: 1 231 513 (2002-08-01), None
patent: WO200265519 (2002-08-01), None

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