Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2011-07-12
2011-07-12
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S073000
Reexamination Certificate
active
07978308
ABSTRACT:
A lithographic apparatus arranged to transfer a pattern from a patterning device onto a substrate is disclosed, the apparatus including a substrate table constructed to hold a substrate, a first clamping system configured to clamp the substrate table to a substrate table support structure, and a second clamping system configured to clamp a substrate to the substrate table after the substrate table has been clamped to the substrate table support structure.
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Office Action as issued for Japanese Patent Application No. 2007-123107, dated May 25, 2010.
Boekholt Franciscus Johannes Maria
Compen Rene Theodorus Petrus
El Bouchaibi Majid
Houben Martijn
Voznyi Oleg
ASML Netherlands B.V.
Nguyen Hung Henry
Pillsbury Winthrop Shaw & Pittman LLP
Whitesell-Gordon Steven H
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