Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-05-08

2007-05-08

Mathews, Alan (Department: 2851)

Agitating

Mortar mixer type

Movable mixing chamber

C355S068000, C355S072000, C355S077000, C356S400000

Reexamination Certificate

active

10857614

ABSTRACT:
A lithographic projection apparatus is disclosed in which a space between the projection system and a sensor is filled with a liquid.

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