Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-03-27
2007-03-27
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000
Reexamination Certificate
active
10972754
ABSTRACT:
A lithographic apparatus includes a substrate support that is constructed to support a substrate, and a projection system that is configured to project a patterned radiation beam onto a target portion of the substrate. The substrate support is arranged to move the substrate along a predetermined trajectory of subsequently targeted target portions of the substrate. The substrate support includes a duct configuration for providing thermal stabilization to the substrate. The duct configuration is arranged to duct thermally stabilizing media in the support, and to substantially duct the media away from a part of the substrate support that supports the target portion via parts of the substrate support that support previously targeted portions of the substrate, so as to keep subsequently targeted target portions thermally stable.
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De Jong Frederik Eduard
Goorman Koen
Menchtchikov Boris
Mertens Jeroen Johannes Sophia Maria
Ottens Joost Jeroen
ASML Netherlands B.V.
Mathews Alan
Pillsbury Winthrop Shaw & Pittman LLP
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