Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-01-09

2007-01-09

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000, C310S012060

Reexamination Certificate

active

10910797

ABSTRACT:
A lithographic apparatus having a positioning device that facilitates the maintenance of a conditioned environment, is presented. Embodiments of the invention include a combination of a first drive unit and a second drive unit for positioning an object table in a lithographic apparatus. The first drive unit has a first part connected to the object table and a second part connected to a first part of the second drive unit. First and second part of the first drive unit are separated from each other by a wall. Maintaining a conditioned environment surrounding the object is thereby facilitated.

REFERENCES:
patent: 5309049 (1994-05-01), Kawada et al.
patent: 6151100 (2000-11-01), Yamane et al.
patent: 6184596 (2001-02-01), Ohzeki
patent: 6252314 (2001-06-01), Ebinuma
patent: 6271606 (2001-08-01), Hazelton
patent: 6437463 (2002-08-01), Hazelton et al.
patent: 6816232 (2004-11-01), Takahashi et al.
patent: 6864601 (2005-03-01), Sogard
patent: 0 342 639 (1989-11-01), None
patent: WO 02/073781 (2002-09-01), None

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