Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2007-07-24

2007-07-24

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S072000

Reexamination Certificate

active

10889066

ABSTRACT:
A lithographic apparatus is provided with a charged object on a projection system of the lithographic apparatus, a substrate table of the lithographic apparatus, or both that is configured to have an electric charge to attract particles thereto.

REFERENCES:
patent: 6232613 (2001-05-01), Silfvast et al.
patent: 6492067 (2002-12-01), Klebanoff et al.
patent: 6642531 (2003-11-01), Powers
patent: 6781673 (2004-08-01), Moors et al.
patent: 2004/0180271 (2004-09-01), Enloe
patent: 2004/0218157 (2004-11-01), Bakker et al.
patent: 2004/0218168 (2004-11-01), Van Groos et al.
patent: 2005/0174549 (2005-08-01), Duineveld et al.

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