Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-05-29
2007-05-29
Lee, Diane (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000, C700S186000
Reexamination Certificate
active
10894366
ABSTRACT:
A lithographic apparatus is presented that includes a controller having a series connection of at least two integrators and an integrator output circuit for deriving an output quantity of the series connection of integrators. The controller also includes an integrator saturator that is operatively coupled to the integrator output circuit and having an operating area for passing through the output quantity and a saturation area for saturating the output quantity. A saturation control mechanism for controlling saturation sets an output quantity of at least one of the series-connected integrators to a neutral value, when the integrator saturator is in the saturation area, except when the output quantity of or an input quantity of at least one of the series-connected integrators has a value such that it would tend to bring the integrator saturator from the saturation area to the operating area.
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De Jongh Robertus Johannes Marinus
Mattaar Thomas Augustus
Van De Ven Jan
Van Den Biggelaar Petrus Marinus Christianus Maria
ASML Netherlands B.V.
Lee Diane
Ohira Marissa A.
Pillsbury Winthrop Shaw & Pittman LLP
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