Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-04-24
2007-04-24
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S053000
Reexamination Certificate
active
11101635
ABSTRACT:
A lithographic apparatus includes an illumination system, a patterning system, a projection system, and a combining system. The illumination system supplies a beam of radiation. The patterning system patterns the beam. The patterning system includes at least two arrays of individually controllable elements arranged to be illuminated by respective portions of the beam, each of the arrays pattering the respective portion of the beam. The combining system combines the patterned portions into the patterned beam. The projection system projects the patterned beam onto a target portion of a substrate.
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ASML Netherlands B.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox PLLC
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