Lithographic apparatus and device manufacturing method...

Details Lithographic apparatus and device manufacturing method... Lithographic apparatus and device manufacturing method...

2011-06-21

2011-06-21

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S077000, C700S121000, C716S055000

Reexamination Certificate

active

07965373

ABSTRACT:
A lithography apparatus with a data-path for converting a representation of a requested dose pattern to a sequence of control data suitable for controlling an array of individually controllable elements. The data path comprises a plurality of data manipulation devices and a calculation load controller for balancing a calculation load between the data manipulation devices. A device manufacturing method using elements of the lithography apparatus, and a flat panel display and integrated circuit device manufactured using the method.

REFERENCES:
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5533170 (1996-07-01), Teitzel et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5701151 (1997-12-01), Plakosh
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5963211 (1999-10-01), Oikawa et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6671035 (2003-12-01), Eurlings et al.
patent: 6687041 (2004-02-01), Sandstrom
patent: 6717097 (2004-04-01), Sandstrom et al.
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 7106417 (2006-09-01), Amm
patent: 7167231 (2007-01-01), Thuren et al.
patent: 7245766 (2007-07-01), Brown et al.
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: 2005/0274911 (2005-12-01), Aloni et al.
patent: 2006/0002627 (2006-01-01), Dolan et al.
patent: 2007/0121090 (2007-05-01), Chen et al.
patent: 1373862 (2002-10-01), None
patent: 1643453 (2005-07-01), None
patent: 6-274608 (1994-09-01), None
patent: 9-016805 (1997-01-01), None
patent: 10-334054 (1998-12-01), None
patent: 546550 (2003-08-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 01/18606 (2001-03-01), None
patent: WO 03/081338 (2003-10-01), None
Search Report, dated Mar. 20, 2007, for EP Patent Application No. EP 06 25 3199, 9 pgs.
Notification of Reasons for Refusal for Patent Application No. 2006-164126 mailed Jul. 21, 2009, 5 pgs.
English Abstract for Japanese Publication No. 2003-508825T published Mar. 4, 2003, 1 pg.
Office Action mailed Oct. 30, 2009 for Taiwan Patent Application No. 095121438, 4pgs.

Affiliated with

Also associated with

Rating

Lithographic apparatus and device manufacturing method... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus and device manufacturing method..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2689663