Lithographic apparatus and device manufacturing method...

Details Lithographic apparatus and device manufacturing method... Lithographic apparatus and device manufacturing method...

2007-04-24

2007-04-24

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000

Reexamination Certificate

active

11089539

ABSTRACT:
A lithographic apparatus in which a size and/or a position of features formed on a substrate are adjusted by adjusting an intensity of radiation at boundaries of pattern features.

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