Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2007-01-30
2007-01-30
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S066000, C355S067000
Reexamination Certificate
active
10784895
ABSTRACT:
A lithographic apparatus includes a device having a plurality blades, each blade selectively insertable into the beam. The device is in a first plane intermediate a second plane conjugate to a plane of the substrate and a third plane conjugate to a pupil plane of the projection system. The blades include a plurality of partially opaque and solid blades or have a predetermined transmissibility pattern. The transmissibility may vary in a second direction perpendicular to the first direction in which the substrate and the patterning device are movable. In an illumination system including a field faceted mirror and a pupil faceted mirror, a plurality of reflecting blades are selectively insertable into the beam to reflect a portion of the beam to a beam dump that may be cooled to reduce a heat load. The reflecting elements may have a coating that scatters the portion of radiation or changes the phase.
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Dierichs Marcel Mathijs Theodore Marie
Van Der Laan Hans
Van Greevenbroek Hendrikus Robertus Marie
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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