Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-10-03
2006-10-03
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
07116402
ABSTRACT:
A system and method are used to form features on a substrate. The system and method include using a first array including individually controllable elements that selectively pattern a beam of radiation, a second array including sets of lenses and apertures stops that form an image from a respective one of the individually controllable elements in a first plane, a third array including lenses that form an image from a respective one of the second array in a second plane, and a substrate table that holds a substrate in the second plane, such that the substrate receives the image from the respective one of the second array. A same spacing is formed between elements in the first, second, and third arrays.
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ASML Netherlands B.V
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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