Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-11-14
2006-11-14
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
07136147
ABSTRACT:
The present invention relates to a lithographic apparatus including an illumination system configured to condition a radiation beam, a patterning device support constructed to support a patterning device, the patterning device being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam, a substrate support constructed to hold a substrate, and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the lithographic apparatus includes an exchangeable object handling apparatus for exchanging an exchangeable object with an exchangeable object loading station and a support, the exchangeable object handling apparatus including three or more end-effectors each capable of exchanging an exchangeable object with one of the supports. Such lithographic apparatus is in particular suited for the streaming of subsequent double exposure jobs.
REFERENCES:
patent: 6414744 (2002-07-01), Kuiper et al.
patent: 6698944 (2004-03-01), Fujita
patent: 6712577 (2004-03-01), Davis et al.
patent: 6930762 (2005-08-01), Yamada
patent: 7009683 (2006-03-01), Sato
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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