Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2011-06-21

2011-06-21

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S067000

Reexamination Certificate

active

07965380

ABSTRACT:
Lithographic apparatus using an array of individually controllable elements in which a fraction of the intensity of the beam of radiation patterned by the array of individually controllable elements is diverted to an image sensor for verifying the quality of the image generated.

REFERENCES:
patent: 4508453 (1985-04-01), Hara et al.
patent: 5048968 (1991-09-01), Suzuki
patent: 5229872 (1993-07-01), Mumola
patent: 5296891 (1994-03-01), Vogt et al.
patent: 5475491 (1995-12-01), Shiozawa
patent: 5500736 (1996-03-01), Koitabashi et al.
patent: 5523193 (1996-06-01), Nelson
patent: 5530482 (1996-06-01), Gove et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5614988 (1997-03-01), Kato et al.
patent: 5677703 (1997-10-01), Bhuva et al.
patent: 5808797 (1998-09-01), Bloom et al.
patent: 5982553 (1999-11-01), Bloom et al.
patent: 6133986 (2000-10-01), Johnson
patent: 6177980 (2001-01-01), Johnson
patent: 6195114 (2001-02-01), Fujita
patent: 6525804 (2003-02-01), Tanaka
patent: 6618185 (2003-09-01), Sandstrom
patent: 6687041 (2004-02-01), Sandstrom
patent: 6696008 (2004-02-01), Brandinger
patent: 6747783 (2004-06-01), Sandstrom
patent: 6795169 (2004-09-01), Tanaka et al.
patent: 6806897 (2004-10-01), Kataoka et al.
patent: 6811953 (2004-11-01), Hatada et al.
patent: 6965119 (2005-11-01), Sandstrom et al.
patent: 7081961 (2006-07-01), Hansen
patent: 7177012 (2007-02-01), Bleeker et al.
patent: 2001/0045690 (2001-11-01), Brandinger
patent: 2003/0099026 (2003-05-01), Sandstrom
patent: 2004/0041104 (2004-03-01), Liebregts et al.
patent: 2004/0053143 (2004-03-01), Sandstrom
patent: 2004/0130561 (2004-07-01), Jain
patent: 2005/0007572 (2005-01-01), George et al.
patent: 58-10833 (1983-01-01), None
patent: 7-218863 (1995-08-01), None
patent: 2004-273572 (2004-09-01), None
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 03/046662 (2003-05-01), None
European Search Report from European Patent Appln. No. 05256273.3, dated Jan. 9, 2006, 10 pages.
English Abstract for Japanese Publication No. JP 58-10833 published Jan. 21, 1983, 2 pgs.
Written Opinion from Australian Patent Office for Application No. SG 200506521-4 mailed on Aug. 16, 2007, 5 pages.

Affiliated with

Also associated with

Rating

Lithographic apparatus and device manufacturing method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus and device manufacturing method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus and device manufacturing method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2686077