Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-10-31
2006-10-31
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S075000
Reexamination Certificate
active
07130019
ABSTRACT:
A lithographic apparatus is provided that includes an illumination system for conditioning a beam of radiation, and a support for supporting a patterning device. The patterning device serves to impart the beam of radiation with a pattern in its cross-section. The apparatus also includes a substrate table for holding a substrate, a projection system for projecting the patterned beam onto a target portion of the substrate, an isolated reference frame for providing a reference surface, and a measuring system for measuring the substrate with respect to the reference surface. The reference frame includes a material having a coefficient of thermal expansion of greater than about 2.9×10−6/K.
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Bartray Petrus Rutgerus
Box Wilhelmus Josephus
Kuit Jan Jaap
Luijten Carlo Cornelis Maria
Luttikhuis Bernardus Antonius Johannes
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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