Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2006-10-10
2006-10-10
Perkey, W. B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C355S072000
Reexamination Certificate
active
07119885
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes an illumination system for conditioning a beam of radiation, and an article support for supporting a substantially flat article to be placed in the beam of radiation. The article support includes a plurality of supporting protrusions for supporting the article, and at least one protective member located near a boundary of the supporting protrusions for protecting at least a boundary portion of the supporting protrusions during release of the article. The apparatus also includes a releasing device for releasing said article from said article support.
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Maria Zaal Koen Jacobus Johannes
Miedema Jan Rein
Ottens Joost Jeroen
Van Empel Tjarko Adriaan Rudolf
Van Meer Aschwin Lodewijk Hendricus Johannes
ASML Netherlands B.V.
Nelson Vivian
Perkey W. B.
Pillsbury Winthrop Shaw & Pittman LLP
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