Lithographic apparatus and device manufacturing method

Details Lithographic apparatus and device manufacturing method Lithographic apparatus and device manufacturing method

2006-04-25

2006-04-25

Tokar, Michael (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S072000, C355S075000, C355S076000, C355S077000

Reexamination Certificate

active

07034924

ABSTRACT:
A lithographic apparatus includes at least one object support structure in a high vacuum chamber. The object support structure includes a carrier device in which a number of dividing walls are provided forming a number of compartments in the carrier device. At least one of the compartments is shielded from the high vacuum chamber and is provided with separate gas evacuating structures.

REFERENCES:
patent: 6188150 (2001-02-01), Spence
patent: 6740891 (2004-05-01), Driessen et al.
patent: 2002/0000029 (2002-01-01), Emoto
patent: 2002/0159046 (2002-10-01), Binnard et al.
patent: 2002/0180946 (2002-12-01), Bisschops et al.
patent: 1 211 562 (2002-06-01), None

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