Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate
2006-05-09
2006-05-09
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
Irradiation of semiconductor devices
C250S50400H, C355S072000, C355S073000, C355S075000, C269S020000, C269S030000, C269S032000, C269S037000, C269S044000, C438S017000
Reexamination Certificate
active
07041989
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes an illumination system arranged to provide a radiation beam, an article support configured to support an article to be placed in a beam path of the radiation beam, a multipolar clamp configured to provide a clamping pressure for clamping the article against the article support, and a bias voltage circuit for biasing at least one electrode of the multipolar clamp, such that the occurrence of ridges that appear due to static charges on the article may be circumvented.
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Le Kluse Marco
Moors Johannes Hubertus Josephina
Neerhof Hendrik Antony Johannes
Ottens Joost Jeroen
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Souw Bernard E.
Wells Nikita
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