Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-04-12
2011-04-12
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000, C355S077000
Reexamination Certificate
active
07924403
ABSTRACT:
A immersion lithographic apparatus is disclosed in which one or more liquid diverters are positioned in a space surrounded by a liquid confinement structure. A function of the liquid diverter(s) is to hinder the formation of one or more recirculation zones of immersion liquid which may lead to variations in refractive index of the immersion liquid in the space and thereby imaging errors.
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Jacobs Johannes Henricus Wilhelmus
Liebregts Paulus Martinus Maria
Uitterdijk Tammo
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
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