Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2011-03-29
2011-03-29
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S072000, C355S077000, C430S311000
Reexamination Certificate
active
07916269
ABSTRACT:
An immersion lithographic apparatus is cleaned by use of a cleaning liquid consisting essentially of ultra-pure water and (a) a mixture of hydrogen peroxide and ozone, or (b) hydrogen peroxide at a concentration of up to 5%, or (c) ozone at a concentration of up to 50 ppm, or (d) oxygen at concentration of up to 10 ppm, or (e) any combination selected from (a)-(d).
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Cromwijk Jan Willem
De Jong Anthonius Martinus Cornelis Petrus
Jansen Hans
Leenders Martinus Hendrikus Antonius
Schuh Nadja
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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