Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2007-07-10
2007-07-10
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000
Reexamination Certificate
active
11319194
ABSTRACT:
A lithographic apparatus has a position measuring apparatus configured to measure a position of a substrate support or a patterning support in a medium. The position measuring apparatus has a barometer to measure a pressure of the medium, thereby providing a pressure signal. The position measuring apparatus has a distance measuring device measuring a reference distance, thereby providing a reference distance signal. The position measuring apparatus has a processor that converts the reference distance signal into a pressure-change signal; processes the pressure-change signal in a similar way as the pressure signal, thereby providing a processed pressure-change signal; determines a difference between the processed pressure-change signal and the pressure signal, thereby providing a drift signal; determines a difference between the pressure-change signal and the drift signal, thereby providing an absolute pressure signal; and corrects a position measurement on the basis of the absolute pressure signal.
REFERENCES:
patent: 4153341 (1979-05-01), Kawamura et al.
patent: 5610683 (1997-03-01), Takahashi
ASML Netherlands B.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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