Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2006-12-19
2006-12-19
Rutledge, D. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C355S071000, C355S077000, C378S034000, C378S035000, C250S492100
Reexamination Certificate
active
07151588
ABSTRACT:
A lithographic apparatus is disclosed. The apparatus includes an illumination system for providing a beam of radiation, a support structure for supporting a patterning device, a substrate support for supporting a substrate, a projection system for projecting the patterned beam of radiation onto a target portion of the substrate, and a thermal compensation deformation unit for compensating for a deformation of an element caused by a thermal load. The thermal compensation deformation unit includes at least one temperature sensor for sensing a temperature in at least one location on the element, and a processing unit for calculating the deformation of the element caused by the thermal load as a function of the temperature sensed at the location. The deformation is calculated using data from a computer-generated model of the element so that an appropriate correction for the deformation can be made or taken into account.
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Box Wilhelmus Josephus
Franken Dominicus Jacobus Petrus Adrianus
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
Rutledge D.
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