Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-09-06
2005-09-06
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S052000, C355S055000
Reexamination Certificate
active
06940587
ABSTRACT:
A measurement system configured to measure wave front aberrations of a projection system, as well as a lithographic apparatus including such a measurement system, is provided wherein the measurement system includes a diffractive element and structure configured to increase the pupil filling of the radiation in the pupil of the projection system, both movable into the projection beam between a radiation system and the projection system, and a sensor module configured to sense radiation that has traversed the projection system to measure wave front aberrations of the projection system.
REFERENCES:
patent: 6650399 (2003-11-01), Baselmans et al.
patent: 2002/0145717 (2002-10-01), Baselmans et al.
patent: 10109929 (2001-11-01), None
patent: 0961149 (1999-12-01), None
patent: 1231514 (2002-08-01), None
European Search Report dated Jul. 31, 2003.
Baselmans Johannes Jacobus Matheus
Leenders Martinus Hendrikus Antonius
Moors Johannes Hubertus Josephina
Van Der Laan Hans
Van Dijsseldonk Antonius Johannes Josephus
ASML Netherlands B.V.
Fuller Rodney
Pillsbury Winthrop Shaw & Pittman LLP
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