Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-07-05
2005-07-05
Mathews, Alan (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C356S400000, C356S401000
Reexamination Certificate
active
06914664
ABSTRACT:
To align between layers having a large Z separation, an alignment system which illuminates reference markers with normally incident radiation is used. The alignment system has an illumination system that is telecentric on the substrate side.
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Wong et al., “Experimental and Simulation Studies of Alignment Marks,”SPIE Optical/Laser Microlithography IV, 1463:315-323 (1991) (Abstract No. XP-000988982).
Best Keith Frank
Consolini Joseph J.
Friz Alexander
Gui Cheng-Qun
Van Buel Henricus Wilhelmus Maria
ASML Netherlands B.V.
Mathews Alan
Pillsbury & Winthrop LLP
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