Lithographic apparatus, a device manufacturing method and a...

Details Lithographic apparatus, a device manufacturing method and a... Lithographic apparatus, a device manufacturing method and a...

2006-08-24

2010-11-30

Bella, Matthew C (Department: 2624)

Image analysis

Image transformation or preprocessing

Measuring image properties

C382S282000, C382S283000, C382S294000

Reexamination Certificate

active

07844131

ABSTRACT:
A method of forming images on a lithographic substrate is disclosed, the method including grouping a plurality of image regions together to form a combined image, determining or receiving a location at which the combined image is to be positioned on the substrate, calculating locations at which the image regions forming the combined image are to be positioned on the substrate, and using a lithographic apparatus to project the image regions at the calculated locations onto the substrate.

REFERENCES:
patent: 6701259 (2004-03-01), Dor et al.
patent: 2002/0187406 (2002-12-01), Magome et al.
patent: 2006/0126046 (2006-06-01), Hansen

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