Lithographic apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C355S053000, C355S067000, C355S072000, C378S034000, C378S035000

Reexamination Certificate

active

07423721

ABSTRACT:
A vacuum operated lithographic apparatus includes a vacuum housing for providing a vacuum environment to a support constructed to support a patterning device, or a substrate table, or a projection system, or any combination thereof. An interior of the vacuum housing includes a plurality of transport circuits for transporting fluids and/or electrical signals for use in a first process mode for lithographic processing. At least one of the transport circuits is adapted to transport energy towards the interior of the vacuum housing to stimulate outgassing in the vacuum housing for use in a second process mode for bringing the lithographic apparatus into a vacuum operating condition.

REFERENCES:
patent: 4622433 (1986-11-01), Frampton
patent: 4851691 (1989-07-01), Hanley
patent: 5024747 (1991-06-01), Turner et al.
patent: 5384804 (1995-01-01), Riedel et al.
patent: 5577552 (1996-11-01), Ebinuma et al.
patent: 5964630 (1999-10-01), Slusarczuk et al.
patent: 6339997 (2002-01-01), Nakagawa et al.
patent: 6445439 (2002-09-01), McCullough
patent: 6458430 (2002-10-01), Bernstein et al.
patent: 2003/0043357 (2003-03-01), Shimoda
patent: 2004/0179178 (2004-09-01), Emoto
patent: 2005/0122490 (2005-06-01), Luttikhuis et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Lithographic apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3968338

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.