Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2004-12-15
2008-09-09
Rutledge, Della J. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S067000, C355S072000, C378S034000, C378S035000
Reexamination Certificate
active
07423721
ABSTRACT:
A vacuum operated lithographic apparatus includes a vacuum housing for providing a vacuum environment to a support constructed to support a patterning device, or a substrate table, or a projection system, or any combination thereof. An interior of the vacuum housing includes a plurality of transport circuits for transporting fluids and/or electrical signals for use in a first process mode for lithographic processing. At least one of the transport circuits is adapted to transport energy towards the interior of the vacuum housing to stimulate outgassing in the vacuum housing for use in a second process mode for bringing the lithographic apparatus into a vacuum operating condition.
REFERENCES:
patent: 4622433 (1986-11-01), Frampton
patent: 4851691 (1989-07-01), Hanley
patent: 5024747 (1991-06-01), Turner et al.
patent: 5384804 (1995-01-01), Riedel et al.
patent: 5577552 (1996-11-01), Ebinuma et al.
patent: 5964630 (1999-10-01), Slusarczuk et al.
patent: 6339997 (2002-01-01), Nakagawa et al.
patent: 6445439 (2002-09-01), McCullough
patent: 6458430 (2002-10-01), Bernstein et al.
patent: 2003/0043357 (2003-03-01), Shimoda
patent: 2004/0179178 (2004-09-01), Emoto
patent: 2005/0122490 (2005-06-01), Luttikhuis et al.
Amhaouch Mustafa
Box Wilhelmus Josephus
Jacobs Hernes
Jacobs Johannes Henricus Wilhelmus
Livesey Robert Gordon
ASML Netherlands B.V.
Rutledge Della J.
Sterne Kessler Goldstein & Fox P.L.L.C.
LandOfFree
Lithographic apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Lithographic apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3968338