Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-01-11
2011-01-11
Mathews, Alan A (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000
Reexamination Certificate
active
07868998
ABSTRACT:
Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant.
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pa
Bijlaart Erik Theodorus Maria
Hoogendam Christiaan Alexander
Kolesnychenko Aleksey Yurievich
Loopstra Erik Roelof
Mertens Jeroen Johannes Sophia Maria
ASML Netherlands B.V.
Mathews Alan A
Pillsbury Winthrop Shaw & Pittman LLP
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