Radiant energy – Means to align or position an object relative to a source or...
Reexamination Certificate
2006-07-14
2009-06-02
Berman, Jack I (Department: 2881)
Radiant energy
Means to align or position an object relative to a source or...
C356S614000, C356S367000, C356S369000, C356S364000, C356S365000, C356S491000, C356S330000, C356S328000, C356S326000, C356S340000, C356S301000, C356S240100, C356S241400, C359S490020, C359S326000, C359S316000, C372S021000, C372S105000, C372S106000, C372S027000, C372S032000
Reexamination Certificate
active
07541600
ABSTRACT:
A method and apparatus for accurately retrieving the position of an optical feature. The method uses the optical properties of biaxial crystals to conically refract the optical feature and transform the image of the optical feature to a circular ring structure. The position of the optical feature is then calculated by locating a center point associated with the circular ring structure.
REFERENCES:
patent: 7456962 (2008-11-01), Blum et al.
Adel, M. et al. Optimized overlay metrology marks: Theory and experiment. IEEE Transactions on Semiconductor Manufacturing, vol. 17, No. 2, pp. 166-179, 2004.
Belafhel, A. Theoretical intensity distribution of internal conical refraction. Optics Communications, vol. 178, Nos. 4-6, pp. 257-265, 2000.
Belsky, A.M. et al. Internal conical refraction of light beams in biaxial gyrotropic crystals. Optics Communications, vol. 204, Nos. 1-6, pp. 1-6, 2002.
Belsky, A.M. et al. Internal conical refraction of limited light-beams in 2-axes crystals. Optika I Spektroskopiya, vol. 44, No. 4, pp. 746-751, 1978.
Berry, M.V. Conical diffraction asymptotics: fine structure of Poggendorff rings and axial spike. Journal of Optics A—Pure and Applied Optics, vol. 6, No. 4, pp. 289-300, 2004.
Berry, M.V. et al. Conical diffraction: Hamiltons's diabolical point at the heart of crystal optics. Submitted to Progress in Optics 2006.
Berry, M.V. et al. Conical diffraction: observations and theory. Proc. R. Soc. A., vol. 462, pp. 1629-1642, 2006.
Boulanger, B. et al. Methodology for optical studies of nonlinear crystals: application to the isomorph familty KTiOPO4, KTiOAsO4, RBTiOAsO4 and CsTiOAsO4. Pure and Applied Optics, vol. 7, No. 2, pp. 239-256, 1998.
Boulanger, B. et al. SHG and internal conical refraction experiments in CsTiOAsO4: Comparison with KTiOPO4 and KTiOAsO4 for 1.32-micrometer Type II SHG. IEEE Journal of Quantum Electronics, vol. 33, No. 6, pp. 945-959, 1997.
Boulanger, B. et al. Spheres and cylinders in parametric nonlinear optics. Optical Materials, vol. 26, No. 4, pp. 459-464, 2004.
Bruckstein, A.M. et al. Design of shapes for precise image registration. IEEE Transactions on Information Theory, vol. 44, No. 7 pp. 3156-3162, 1998.
Chen, X.L. et al. Experimental comparison of off-axis illumination and imaging interferometric lithography. Journal of Vacuum Science and Technology B, vol. 17, No. 3, pp. 921-929, 1999.
Chin, M.K. et al. Design and modeling of waveguide-coupled single-mode microring resonators. Journal of Lightwave Technology, vol. 16, No. 8, pp. 1433-1446, 1998.
Chipman, R.A. et al. Handbook of Optics—Chapter 22: Polarimetry. McGraw-Hill: New York, 1995.
Connors, J.M. et al. High finesse ring resonators made by silver sion-exchange in glass. Journal of Lightwave Technology, vol. 5, No. 12, pp. 1686-1689, 1987.
Dreger, M.A. Optical beam propagation in biaxial crystals. Journal of Optics A—Pure and Applied Optics, vol. 1, No. 5, pp. 601-616, 1999.
Eimerl, D. et al. Deuterated L-arginine phosphate—a new efficient nonlinear crystal. IEEE Journal of Quantum Electronics, vol. 25, No. 2, pp. 179-193, 1989.
Feve, J.P. et al. Experimental-Study of internal and external conical refractions in KTP. Optics Communications, vol. 105, Nos. 3-4, pp. 243-252, 1994.
Fritze, M. et al. 100-nm node lithography with KrF? Optical Microlithography XIV, Proceedings of SPIE, vol. 4346, pp. 191-204, 2001.
Fritze, M. et al. Lithography Part I of a Series: Prospects and challenges of optical RET. Solid State Technology, vol. 46, No. 2, pp. 61-64, 2003.
Frommer, A. et al. In field overlay uncertainty contributors. Metrology, Inspection, and Process Control for Microlithography XIX, San Jose, CA, Proceedings of SPIE, vol. 5752, pp. 51-58 2005.
Haertle, D. et al. Refractive indicies of Sn2P2S6 at visible and infrared wavelengths. Optics Express, vol. 13, No. 6, pp. 2047-2057, 2005.
Hamilton, W.R. Third supplement to an essay on the theory of systems of rays. Trans. Royal Irish Acad., vol. 17, part 1, pp. 1-144, 1837.
Hansson, G. et al. Transmission measurements of KTP and isomorphic compounds. Applied Optics, vol. 39, No. 27, pp. 5058-5069, 2000.
Hellstrom, J. et al. Optical parametric amplification in eriodically poled KTiOPO4 seeded by an Er-Yb : glass microchip laser. Optics Letters, vol. 26, No. 6, pp. 352-354, 2001.
Hierle, R. et al. Growth and characterization of a new material for nonlinear optics—methyl-3-nitro-4-pyridine-1-oxide (POM). Journal of Crystal Growth, vol. 69, Nos. 2-3, pp. 545-554, 1984.
International Technology Roadmap for Semiconductors, 2004 Update, Metrology. 19 pp., 2004.
International Technology Roadmap for Semiconductors, 2004 Update, Lithography. 28 pp., 2004.
Isaenko, L. et al. Growth and characterization of LilnS2 single crystals. Journal of Crystal Growth, vol. 218, Nos. 2-4, pp. 313-322, 2000.
Jinbo, H. et al. Improvement of phase-shifter edge line mask method. Japanese Journal of Applied Physics Part 1—Regular Papers, Short Notes, and Review Papers, vol. 30, No. 11B, pp. 2998-3003, 1991.
Kaminskii, A.A. et al. Monocrystalline 2-adamantylamino-5-nirtopyridine (AANP)—a novel organic material for laser Raman converters in the visible and near-IR. Japanese Journal of Applied Physics Part 2—Letters, vol. 41, No. 6A, pp. L603-L605, 2002.
Kamon, K. et al. Photolithography system using annular illumination. Japanese Journal of Applied Physics Part 1—Regular Papers, Short Notes, and Review Papers, vol. 30, No. 11B, pp. 3021-3029, 1991.
Kazak, N.S. et al. Forming annular and Bessel light beams under conditions of internal conical refraction. Journal of Optical Technology, vol. 67, No. 12, pp. 1064-1067, 2000.
King, T.A. et al. Formation of higher-order Bessel light beams in biaxial crystals. Optics Communications, vol. 187, pp. 407-414, 2001.
Ledoux, I. et al. Linear and nonlinear optical-properties of N-4-nitrophenyl L-prolinol single-crystals. Optics Communications, vol. 80, No. 2, pp. 149-154, 1990.
Levenson, M.D. et al. Improving resolution in photolithography with a phase-shifting mask. IEEE Transactions on Electron Devices, vol. 29, No. 12, pp. 1828-1836, 1982.
Levenson, M.D. et al. The phase-shifting mask. II. Imaging simulations and submicrometer resist exposures. IEEE Transactions on Electron Devices, vol. 31, No. 6, pp. 753-763, 1984.
Levenson, M.D. Extending the lifetime of optical lithography technologies with wave-front engineering. Japanese Journal of Applied Physics Part 1—Regular Papers, Short Notes, and Review Papers, vol. 33, No. 12B, pp. 6765-6773, 1994.
Li, L.X. et al. Growth and spectra of YCOB and Nd : YCOB crystals. Crystal Research and Technology, vol. 35, pp. 1361-1371, 2000.
Lloyd, H. On the phenomena presented by light in its passage along the axes of biaxial crystals. The London and Edinburgh Philosophical Magazine and Journal of Science, vol. 2, pp. 207-210, 1833.
Meier, U. et al. DAST—A high optical nonlinearity organic crystal. Synthetic Metals, vol. 109, Nos. 1-3, pp. 19-22, 2000.
O'Gorman, L. Subpixel registration using a concentric ring fiducial. Proceedings of the 10th Internation Conference on Pattern Recognition, Atlantic City, NJ, vol. 2, pp. 249-253, Jun. 16-21, 1990.
Pollentier, I. et al. Thinking outside the box for improved overlay metrology. Yield Management Solutions Magazine, vol. 5, No. 2, pp. 12-16, 2003.
Pujol, M.C. et al. Crystal growth and spectroscopic characterization of Tm3+-doped KYb(WO4)(2) single crystals. Physical Review B, vol. 66, No. 14, 2002.
Pujol, M.C. et al. Growth, optical characterization, and laser operation of a stoichiometric crystal KYb(WO4)(2). Physical Review B, vol. 65, No. 6, 2002.
Raman, C.V. et al. Conical refraction in naphthalene crystals. Nature, vol. 147, pp. 221-227, 1941.
Schell, A.J. et al. 2nd harmonic conical refraction. Optics Communications, vol. 21, No. 1, pp. 150-153, 1977.
Schell, A.J. et al. Laser studies of internal conical diffraction. III. 2nd-harmonic conical refraction in alpha-iodic acid. Physical Review A, vol. 18, No. 6, pp. 2592-2602, 1978.
Schellenberg, F.M. A history o
Neuhauser Daniel
Sirat Gabriel Y.
Berman Jack I
O'Banion John P.
Sahu Meenakshi S
The Regents of the University of California
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