Lithographic and etching apparatus

Details Lithographic and etching apparatus Lithographic and etching apparatus

1978-07-31

1980-06-17

Coughenour, Clyde I.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

15102, 134 64R, 156905, 1011325, 101141, 271245, 271270, C23F 108, C23F 102

Patent

active

042082331

ABSTRACT:
A feed unit (17) feeds a master sheet (14) from an etching unit (28) to a master drum (13), the distance from the etching unit (28) to the feed unit (17) being smaller than the length of the master sheet (14). The feed unit (17) includes a support member (48); (73) disposed above the etching unit (28) and a retractable stopper (41). A lifting member (48); (72) lifts the trailing edge portion of the master sheet (14) onto the support member (48); (73) after the leading edge portion of the master sheet (14) is abuttingly stopped by the stopper (41). The support member (48); (73) and lifting member (48); (72) may be integral and constituted by a conveyor belt (48). Alternatively, the support member (48); (73) may be constituted by a support plate (73) and the lifting member (48); (72) constituted by a rocker frame (72).

REFERENCES:
patent: 1545915 (1925-07-01), Maxson
patent: 2110585 (1938-03-01), Barber
patent: 2231274 (1941-02-01), Marcher
patent: 2260464 (1941-10-01), Kropp
patent: 2407443 (1946-09-01), Peterson
patent: 2749120 (1956-06-01), Mallory
patent: 3170391 (1965-02-01), Ritzerfeld
patent: 3930925 (1976-01-01), Yamanaka
patent: 3987722 (1976-10-01), Goodwin
patent: 4036135 (1977-07-01), Raible

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