Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2008-03-18
2008-03-18
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S067000
Reexamination Certificate
active
10792909
ABSTRACT:
A lithographic apparatus equipped with an improved alignment system, is presented herein. In one embodiment, the apparatus includes a radiation system for providing a projection beam of radiation, a support structure for supporting a patterning device that configures the projection beam according to a desired pattern, a substrate holder for holding a substrate, projection system for projecting the patterned beam onto a target portion of the substrate, and an alignment system. The alignment system includes a radiation source for illuminating at least one mark which is usable for alignment on a substrate and an imaging system for imaging light which has interacted with the at least one mark to generate alignment information.
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'T Hooft Gert Wim
Hendriks Robert Frans Maria
Lenderink Egbert
Monshouwer Rene
Van Der Lee Alexander Marc
ASML Netherlands B.V.
Koninklijke Philips Electronics , N.V.
Nguyen Henry Hung
Pillsbury Winthrop Shaw & Pittman LLP
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