Lithographic actuator mechanism, lithographic apparatus, and...

Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper

Reexamination Certificate

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C355S075000, C355S053000

Reexamination Certificate

active

07088428

ABSTRACT:
Lorentz actuators generate heat due to electrical dissipation in the field coils. As the field through the coils changes, eddy currents are induced in cooling elements leading to undesirable damping forces and heating. The present invention provides an improved design that reduces eddy currents by incorporating slits in the cooling element. Slits are preferably perpendicular to the induced electric field and parallel to each other, and reduce the magnitude of the eddy currents by forcing them to take paths of higher electrical resistance.

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patent: 6476383 (2002-11-01), Esslinger et al.
patent: 6606019 (2003-08-01), Ohashi
patent: 2002/0096946 (2002-07-01), Bisschops
patent: 2003/0048167 (2003-03-01), Inoue et al.
patent: 2003/0141769 (2003-07-01), Kubo
patent: WO 98/33096 (1998-07-01), None
patent: WO 98/38597 (1998-09-01), None
patent: WO 98/40791 (1998-09-01), None
European Search Report in reference to EP 03 25 1446, dated Feb. 5, 2004.

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