Lithium tantalate substrate and process for its manufacture

Details Lithium tantalate substrate and process for its manufacture Lithium tantalate substrate and process for its manufacture

2004-10-07

2009-12-08

Mayes, Melvin C (Department: 1793)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth with a subsequent step acting on the...

C117S003000, C117S004000

Reexamination Certificate

active

07628853

ABSTRACT:
A lithium tantalate substrate obtained by working in the state of a substrate a lithium tantalate crystal grown by the Czochralski method is buried in a mixed powder of Al and Al2O3, followed by heat treatment carried out at a temperature kept to from 350 to 600° C., to manufacture a lithium tantalate substrate having volume resistivity which has been controlled within the range of from more than 108to less than 1010Ωcm. The substrate obtained has no pyroelectricity, and it can be made colored and opaque from a colorless and transparent state and also sufficiently has the properties required as a piezoelectric material.

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