Lithium tantalate substrate and method of manufacturing same

Details Lithium tantalate substrate and method of manufacturing same Lithium tantalate substrate and method of manufacturing same

2006-08-22

2009-06-09

Kunemund, Robert M (Department: 1792)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

C117S020000, C117S032000, C117S948000, C310S31300R, C310S344000

Reexamination Certificate

active

07544246

ABSTRACT:
In a process for manufacturing a LT substrate from a LT crystal, after growing the crystal, a LT substrate in ingot form is imbedded in carbon power, or is place in a carbon vessel, and heat treated is conducted at a maintained temperature of between 650° C. and 1650° C. for at least 4 hours, whereby in a lithium tantalate (LT) substrate, sparks are prevented from being generated by the charge up of an electric charge on the substrate surface, and thereby destruction of a comb pattern formed on the substrate surface and breaks or the like in the LT substrate are prevented.

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