Lithium tantalate substrate and method of manufacturing same

Details Lithium tantalate substrate and method of manufacturing same Lithium tantalate substrate and method of manufacturing same

2007-08-14

2009-06-09

Kunemund, Robert M (Department: 1792)

Single-crystal, oriented-crystal, and epitaxy growth processes;

Processes of growth from liquid or supercritical state

Having pulling during growth

C117S020000, C117S032000, C117S948000, C310S31300R, C310S344000

Reexamination Certificate

active

07544248

ABSTRACT:
In a process for manufacturing a LT substrate from a LT crystal, after growing the crystal, a LT substrate in ingot form is imbedded in carbon power, or is place in a carbon vessel, and heat treated is conducted at a maintained temperature of between 650° C. and 1650° C. for at least 4 hours, whereby in a lithium tantalate (LT) substrate, sparks are prevented from being generated by the charge up of an electric charge on the substrate surface, and thereby destruction of a comb pattern formed on the substrate surface and breaks or the like in the LT substrate are prevented.

REFERENCES:
patent: 5359452 (1994-10-01), Nitanda et al.
patent: 5436757 (1995-07-01), Okazaki et al.
patent: 5517942 (1996-05-01), Fukuda et al.
patent: 5521750 (1996-05-01), Onoe et al.
patent: 5539569 (1996-07-01), Fukuda et al.
patent: 5650006 (1997-07-01), Kawaguchi et al.
patent: 5844347 (1998-12-01), Takayama et al.
patent: 6310423 (2001-10-01), Tanaka et al.
patent: 6319430 (2001-11-01), Bordui et al.
patent: 6392234 (2002-05-01), Diekmann
patent: 6628178 (2003-09-01), Uchikoba
patent: 2002/0011568 (2002-01-01), Diekmann
patent: 2004/0163596 (2004-08-01), Miles et al.
patent: 2004/0255842 (2004-12-01), Kajigaya et al.
patent: 2006/0169196 (2006-08-01), Shiono
patent: 2006/0283372 (2006-12-01), Kajigaya et al.
patent: 2006/0283375 (2006-12-01), Kajigaya et al.
patent: 2006/0292706 (2006-12-01), Tokuda et al.
patent: 2007/0006797 (2007-01-01), Kajigaya et al.
patent: 0 921 215 (1999-06-01), None
patent: 0 893 515 (2003-11-01), None
patent: 52053800 (1977-04-01), None
patent: 62078196 (1987-04-01), None
patent: 11-92147 (1989-08-01), None
patent: 05124897 (1993-05-01), None
patent: 11-236298 (1999-08-01), None
patent: 2002111420 (2002-04-01), None
patent: 2004-35396 (2004-02-01), None
patent: WO 01/26886 (2001-04-01), None
patent: WO 01/33260 (2001-05-01), None
patent: WO 2004/002891 (2004-01-01), None
Albert Ballman “Growth of Piezoelectric and Ferroelectric Materials by the Czochralski Technique” Journal of the American Ceramic Society, vol. 48, No. 2, Feb. 1965, pp. 112-113.
S. Youssef et al.,“Characterization of LiTaO3 Thin. Films Fabricated by Sol-Gel Technique”, Jan. 2007, Elsevier Science Publishers B.V., vol. 38 Issue 1, pp. 63-66 (Abstract enclosed).
Derwent-ACC-No. 1979-20670B; Derwent-Week: 197911, Lithium Tanatlite Dielectric Material for use in Electronics . . . .
“Transparent Conducting Film Technology”, Japan Society for the Promotion of Science. Ohm Co. (1999) pp. 55-57.

Affiliated with

Also associated with

Rating

Lithium tantalate substrate and method of manufacturing same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithium tantalate substrate and method of manufacturing same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithium tantalate substrate and method of manufacturing same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4068800