Gas and liquid contact apparatus – With external supply or removal of heat – Temperature or humidity sensor
Patent
1996-01-26
1997-09-02
Miles, Tim R.
Gas and liquid contact apparatus
With external supply or removal of heat
Temperature or humidity sensor
B01F 304
Patent
active
056628382
ABSTRACT:
A liquid vaporizing apparatus includes a container for holding a liquid at a constant temperature with a temperature adjustment unit and a gas that does not react with the liquid is bubbled through the liquid in the container to vaporize the liquid. The container for holding the liquid has an internal space above the liquid and a second temperature adjustment unit for controlling the temperature of the internal space separately from the temperature of the liquid in the container. Since the internal space is maintained at a constant temperature, higher than the temperature of the liquid, the quantity of the vaporized liquid produced is stable.
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Suenaga Takayuki
Tsutahara Kouichirou
Yamaguchi Tooru
Miles Tim R.
Mitsubishi Denki & Kabushiki Kaisha
Ryoden Semiconductor System Engineering Corporation
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