Gas and liquid contact apparatus – Fluid distribution – Valved
Reexamination Certificate
2006-03-14
2006-03-14
Bushey, Scott (Department: 1724)
Gas and liquid contact apparatus
Fluid distribution
Valved
C261S121100, C261S127000, C261SDIG065
Reexamination Certificate
active
07011299
ABSTRACT:
In accordance with the present invention, a method and system is described for controlling the delivery of vapor from a bubbler containing a supply of chemical fluid through which a carrier gas is bubbled and from which bubbler vapors are delivered in a vapor stream entrained with the carrier gas. In general, the present invention involves equilibrating the pressure within the head space to that of the chemical fluid fill line, thus maintaining a constant fluid level based on pressure and not relying on conventional level sensors and controllers.
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Bushey Scott
Hogan & Hartson L.L.P.
Lembke Kent A.
Matheson Tri-Gas, Inc.
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