Liquid treatment method using alternating electrical contacts

Details Liquid treatment method using alternating electrical contacts Liquid treatment method using alternating electrical contacts

2005-10-11

2005-10-11

King, Roy (Department: 1742)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Controlling current distribution within bath

C204S22400M, C204S230500, C204SDIG007, C205S102000, C205S118000, C205S123000, C205S640000, C205S687000

Reexamination Certificate

active

06953522

ABSTRACT:
A contact is disposed to come into contact with a metal layer formed on a substrate being treated, the contact being in contact with a surface being treated from an opposite surface through a through hole present in a substrate. Alternatively, a contact is disposed to come into contact with a metal layer formed on a substrate, the contact coming into contact at an approximate center of the substrate. Alternatively, a plurality of needle bodies are disposed to be in electrical contact with a metal layer of a substrate being treated, thereby power supply for electrolytic polishing/plating to a substrate being treated being implemented, without restricting to a periphery of a substrate, from a plurality of points on a surface thereof. Due to any one of these, liquid treatment equipment enables to improve uniformity in plane of an electric current sent to a surface being treated and of liquid treatment.

REFERENCES:
patent: 4134801 (1979-01-01), Hofer et al.
patent: 5167792 (1992-12-01), Kamitakahara et al.
patent: 6099712 (2000-08-01), Ritzdorf et al.
patent: 6132587 (2000-10-01), Jorne et al.
patent: 6500317 (2002-12-01), Yoshioka et al.
patent: 6500325 (2002-12-01), Kosaki et al.
patent: 6758958 (2004-07-01), Steenkiste et al.

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