Liquid treatment apparatus, mounting and dismounting method...

Details Liquid treatment apparatus, mounting and dismounting method... Liquid treatment apparatus, mounting and dismounting method...

2011-07-26

2011-07-26

Tadesse, Yewebdar T (Department: 1713)

Coating apparatus

Projection or spray type

With hood or offtake for waste material

C118S052000, C118S319000, C118S320000

Reexamination Certificate

active

07984690

ABSTRACT:
A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

REFERENCES:
patent: 4315705 (1982-02-01), Flint
patent: 6247479 (2001-06-01), Taniyama et al.
patent: 6589338 (2003-07-01), Nakamori et al.
patent: 6715943 (2004-04-01), Nagamine
patent: 2004/0197433 (2004-10-01), Terada et al.
patent: 2002-280296 (2002-09-01), None

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