Liquid supplying device

Details Liquid supplying device Liquid supplying device

1997-12-16

2000-01-18

Douglas, Steven O.

Dispensing

Automatic control

Material level control

222 61, 137208, B67D 508

Patent

active

060150661

ABSTRACT:
Disclosed herein is a device for supplying a liquid to a plurality of apparatuses which apply the liquid to substrates to process the substrates. The device comprises a tank containing the liquid, a supply passage for supplying the liquid from the tank to the apparatuses, branch passages connected to the supply passage, for supplying the liquid to liquid-applying members provided in the apparatuses, and valves provided on the branch passages, respectively. The valves are controlled each other, for opening and closing the branch passages such that the liquid-applying member of one apparatus applies the liquid to a substrate while the liquid-applying member of any other apparatus remains to apply the liquid to a substrate.

REFERENCES:
patent: 5383574 (1995-01-01), Raphael
patent: 5416047 (1995-05-01), Konishi et al.
patent: 5868278 (1999-02-01), Chen
Patent Abstracts of Japan, vol. 18, No. 81, Feb. 9, 1994, JP 5-289344, Nov. 5, 1993 (abstract only).
Patent Abstracts of Japan, vol. 16, No. 524, Oct. 28, 1992, JP 4-197434, Jul. 17, 1992 (abstract only).

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